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Journal Articles Microsystem Technologies Year : 2018

Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications

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hal-04116501 , version 1 (04-06-2023)

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Zhichao Shi, Benoît Bélier, Emile Martincic, Laurent Petit, Johan Moulin, et al.. Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications. Microsystem Technologies, 2018, 24 (1), pp.411-417. ⟨10.1007/s00542-017-3320-1⟩. ⟨hal-04116501⟩
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