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Microlithography Technique Advantages, Limits and Its Coupling with EBSD Measurements

Julie Marteau 1, 2 Halim Haddadi Salima Bouvier
1 LPMTM - Laboratoire des Propriétés Mécaniques et Thermodynamiques des Matériaux
2 Roberval - Roberval
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https://hal.utc.fr/hal-02968744
Contributor : Julie Marteau <>
Submitted on : Friday, October 16, 2020 - 9:02:11 AM
Last modification on : Tuesday, October 20, 2020 - 3:37:43 AM

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UNIV-COMPIEGNE | ROBERVAL | CNRS | GALILE | UNIV-PARIS13 | USPC

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Julie Marteau, Halim Haddadi, Salima Bouvier. Microlithography Technique Advantages, Limits and Its Coupling with EBSD Measurements. Imaging Methods for Novel Materials and Challenging Applications, Volume 3, pp.279-285, 2013, ⟨10.1007/978-1-4614-4235-6_39⟩. ⟨hal-02968744⟩

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